| Product Name: | SJ6000 Laser Interferometer Measurement System | Linear Measuring Range: | 0~80m |
|---|---|---|---|
| Resolution: | 1nm | Laser Frequency Accuracy: | 0.05ppm |
| Operating Temperature:: | (0-40)℃ | Dynamic Capture Rate:: | 50kHz |
| Highlight: | Single Frequency Laser Interferometer,0.05ppm Measuring Devices,1nm Resolution Measuring Devices |
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Laser interferometer is recognized as a high precision, high sensitivity measuring method that uses light wavelength as a criterion, widely used in high-end manufacturing domains. The SJ6000 laser interferometer system incorporates a high-frequency Helium-Neon laser generator from a USA supplier, high-precision environmental compensation modules, advanced laser interference signal processing, and a high-performance computer control system.
Utilizing thermal frequency stabilization technology of laser dual-longitudinal mode and geometric parameters interference optical path design, the SJ6000 delivers long-term stable, high-precision (0.05ppm) laser output quickly (approximately 6 minutes) with powerful anti-interference performance. With different prism modules, it can measure linearity, angle, straightness, flatness, perpendicularity, and analyze dynamic characteristics.
| Parameter | Specification |
|---|---|
| Measuring method | Single frequency |
| Laser frequency accuracy | 0.05ppm |
| Dynamic capture rate | 50kHz |
| Warm-up time | Approximately 6 minutes |
| Operating temperature | (0-40)℃ |
| Environment conditions | Temperature: (0-40)℃, Humidity: 0-95% |
| Storage temperature | -20℃ to 70℃ |
| Sensor Type | Specification |
|---|---|
| Atmospheric temperature sensor | ±0.1℃ (0-40)℃, resolution: 0.01℃ |
| Material temperature sensor | ±0.1℃ (0-40)℃, resolution: 0.01℃ |
| Atmospheric humidity sensor | ±5% (0-95%) |
| Atmospheric pressure sensor | ±0.1kPa (65-115)kPa |
| Parameter | Specification |
|---|---|
| Measuring range | (0-80)m |
| Measuring accuracy | 0.5ppm (0-40)℃ |
| Measuring resolution | 1nm |
| Maximum measuring speed | 4m/s |
| Parameter | Specification |
|---|---|
| Axial range | (0-15)m |
| Measuring range | ±10° |
| Accuracy | ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m) |
| Measuring resolution | 0.1″ |
| Parameter | Specification |
|---|---|
| Axial range | (0-15)m |
| Flatness measuring range | ±1.5mm |
| Accuracy | ±(0.2%R+0.02M²)μm (R is indicating value in μm; M is measured length in m) |
| Substrate size | 180mm adjustable, 360mm adjustable |
| Measuring resolution | 0.1μm |
| Type | Axis Range | Measuring Range | Accuracy | Resolution |
|---|---|---|---|---|
| Short straightness | (0.1-4)m | ±3.0mm | ±(0.5+0.25%R+0.15M²)μm | 0.01μm |
| Long straightness | (1-20)m | ±3.0mm | ±(5.0+2.5%R+0.015M²)μm | 0.01μm |
| Type | Axis Range | Measuring Range | Accuracy | Resolution |
|---|---|---|---|---|
| Short straightness | (0.1-3)m | ±3.0mm | ±(2.5+0.25%R+0.8M)μm/m | 0.01μm |
| Long straightness | (1-15)m | ±3.0mm | ±(2.5+2.5%R+0.08M)μm/m | 0.01μm |