| Sensor: | Digital Type Contour Sensor&Standard No-head Roughness Sensor | Sorftware: | CMS Contour Measurement System&RMW Surface Roughness Measurement And Anlysis System |
|---|---|---|---|
| Applicant: | Articulated Arm Bearing ,Optical Grade Germanium Crystal,Seal Ring,Turbo Seal Etc | Contour Accuracy: | ±2´ |
| Roughness: | Rsk,Rku,Rsm,Rsm,Rs,RΔq,Rk,Rpk,Rvk,Mr1,Mr2,Rmr | Rating Length: | λcX2,3,4,5,6,7 |
| X-axis: | 0.1~10mm/s | Z-axis: | 0.5-10mm/s |
| Highlight: | 10mm/s Contour Measuring Instrument,Rsk Roughness Contour Measuring Instrument,Rku Roughness Measuring Instrument |
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| Specification | PR1103G-sdk |
|---|---|
| Measuring Range X-axis | 100mm |
| Measuring Range Z-axis | 320mm |
| Measuring Range Z1-axis | C:±12.5mm/R:±420µm |
| Contour Accuracy Z1 Linear Precision | ±(1.5+|0.2H|)µm |
| Arc Accuracy | ±(2+R/8)µm |
| Angle Accuracy | ±2´ |
| Straightness | 0.8µm/100mm |
| Roughness Accuracy Linear Precision | ±4% |
| Residual Noise | ≤0.02µm |
| Duplicate Value | 1δ≤2nm |
| Cutoff Wavelength | 0.025, 0.08, 0.25, 0.8, 2.5, 8mm |
| Rating Length | λcX2,3,4,5,6,7 |
| Drive Speed X-axis | 0.1~10mm/s |
| Drive Speed Z-axis | 0.5-10mm/s |